Products for Residual Gas Analysis
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/rga.jpg)
RGA Series
Systems for the examination of components present in a vessel or evolved from a process. Measures the concentration of gases and vapours in real time.
![](https://www.hidenanalytical.com/wp-content/uploads/2021/04/HALO201-with-wires-white.jpg)
HALO RGA
A Residual gas analyser for vacuum fingerprint analysis, leak detection and trend analysis.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/08/ion-source.jpg)
Ion Source Options
A range of electron impact ion sources that can be supplied with any of our residual gas analysers. Configures residual gas analysers for specific applications, molecular beam analysis for example.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/hmt.jpg)
HMT
A dual mode RGA system for vacuum diagnostics and process monitoring without differential pumping. Measures the residual gases, process contaminates and provides for leak detection.
![RGA vacuum fired ion source](https://www.hidenanalytical.com/wp-content/uploads/2022/04/RGA-vacuum-fired-ion-source-e1649334616208.png)
HAL 201 RC
A Residual Gas Analyser configured for demanding UHV applications. Measures the concentration of gases and vapours in real time.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/halo-201-mbe.jpg)
HALO 201 MBE
A residual gas system configured for molecular beam epitaxy applications. Measures residual gases and provides for contamination and leak detection in MBE systems.
![](https://www.hidenanalytical.com/wp-content/uploads/2021/04/EPIC-9mm-with-cryo-4.png)
EPIC / EPIC 1000 Series
A system for UHV analysis of neutrals, radicals and ions. Measures the ions, neutrals, and partial pressures in UHV/XHV.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/idp-1000.jpg)
IDP / IDP 1000 Series
A system for analysis of ions, neutrals and radicals in UHV desorption studies. Measures ions and neutrals in electron and photon stimulated desorption.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/3f-series.jpg)
3F Series / 1000 Series RGA
A system for high precision scientific and process applications. Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU.
![](https://www.hidenanalytical.com/wp-content/uploads/2021/03/XBS_300x200px.png)
XBS
A system for multiple source monitoring in MBE deposition applications. For molecular beam analysis and deposition rate control.
![](https://www.hidenanalytical.com/wp-content/uploads/2021/04/HAL301-3F-LP-Ion-Source1.jpg)
3F PIC
Hiden’s 3F PIC Series Quadrupoles are high precision triple filter analysers with digital detectors for ultimate sensitivity and time resolution in UHV TPD applications.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/dls-1.jpg)
DLS-1
A system for tokamak/torus fusion research. Measures the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/dls-10.jpg)
DLS-10
Ultra High Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/dls-20.jpg)
DLS-20
Unique Dual-zone Switching Ultra High Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/05/hal-101.jpg)
HAL 101X
A system for tokamak/torus fusion research with remote analyser mounting up to 140m. Includes the DLS-1 system TIMS mode for Measurement the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.