Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2

Jun 20, 2024

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Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2

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Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2

Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2

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