An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron.

Aug 25, 2016

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An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron.

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An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron.

An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron.

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