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HiPIMS

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Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films 56.00 KB 11 downloads

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition...
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Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets 27.90 MB 19 downloads

Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets ...