ALD Atomic Layer Deposition –
Vacuum Processing of Thin Films
![TOF-qSIMS Workstation (2) Compact SIMS](https://www.hidenanalytical.com/wp-content/uploads/2023/01/TOF-qSIMS-Workstation-2.png)
ToF-qSIMS
Nanoscale Surface Analysis for ALD Films.
![EQP_Compilation_23NOV18 Compact SIMS](https://www.hidenanalytical.com/wp-content/uploads/2023/01/EQP_Compilation_23NOV18.png)
EQP Series
Rapid acquisition mass and energy analysis for plasma-assisted ALD.
![HPR-30 Multi HAL201 with 3-Stage Sampling Manifold & 1-Bay Trolley 750 x 618 Compact SIMS](https://www.hidenanalytical.com/wp-content/uploads/2020/10/HPR-30-Multi-HAL201-with-3-Stage-Sampling-Manifold-1-Bay-Trolley-750-x-618.jpg)
HPR-30 Series
Precise process gas analysis across a wide sampling pressure range.
![HMT100 HAL100 3in with wires 3000x2250 Compact SIMS](https://www.hidenanalytical.com/wp-content/uploads/2022/05/HMT100-HAL100-3in-with-wires-3000x2250-1.png)
HMT
Reliable vacuum process analysis and RGA in high-pressure environments.
![](https://www.hidenanalytical.com/wp-content/uploads/2020/12/shutterstock_1652367535.jpg)
Knowledge, Experience, Expertise
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